发明名称 Semiconductor component including an edge termination having a trench and method for producing
摘要 A semiconductor component includes a semiconductor body having a first side, a second side, an edge delimiting the semiconductor body in a lateral direction, an inner region and an edge region. A first semiconductor zone of a first conduction type is arranged in the inner region and in the edge region. A second semiconductor zone of a second conduction type is arranged in the inner region and adjacent to the first semiconductor zone. A trench is arranged in the edge region and has first and second sidewalls and a bottom, and extends into the semiconductor body. A doped first sidewall zone of the second conduction type is adjacent to the first sidewall of the trench. A doped second sidewall zone of the second conduction type is adjacent to the second sidewall of the trench. A doped bottom zone of the second conduction type is adjacent to the bottom of the trench. Doping concentrations of the sidewall zones are lower than a doping concentration of the bottom zone.
申请公布号 US8093676(B2) 申请公布日期 2012.01.10
申请号 US20080166531 申请日期 2008.07.02
申请人 SCHMIDT GERHARD;INFINEON TECHNOLOGIES AUSTRIA AG 发明人 SCHMIDT GERHARD
分类号 H01L23/58 主分类号 H01L23/58
代理机构 代理人
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