| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a screen printing stencil with amorphous carbon films such as DLC films and water/oil repellent layers, which are tightly fixed on at least part of the amorphous carbon films. <P>SOLUTION: The disclosed screen stencil 10 includes: a mesh 16 fixed to a frame 12; an emulsion layer 14, filled in the mesh 16, in which a printing-pattern opening 18 is formed; an amorphous carbon film layer, which is formed on at least part of the surface of an inner wall 22 of the printing pattern opening 18, and which contains at least one element among silicon, oxygen and nitrogen; and a silane-coupling-agent thin-film layer 20, which is provided on at least part of the amorphous carbon film layer, and which contains fluorine. <P>COPYRIGHT: (C)2012,JPO&INPIT |
