发明名称 EXTENSION TAPE SHRINKAGE DEVICE
摘要 <P>PROBLEM TO BE SOLVED: To provide an extension tape shrinkage device capable of shrinking an extended portion of an extension tape without degrading the characteristics of an adhesive film and a work. <P>SOLUTION: An extension tape shrinkage device 5 comprises: a hot air injection unit 541 that injects hot air to an extended portion of an extension tape between a work and an annular flame; and a cold air injection unit 542 that injects cold air to a boundary area between the extended portion of the extension tape to which hot air is injected and the work 1 when the hot air injection unit 541 injects hot air. <P>COPYRIGHT: (C)2012,JPO&INPIT
申请公布号 JP2012009464(A) 申请公布日期 2012.01.12
申请号 JP20100141171 申请日期 2010.06.22
申请人 DISCO ABRASIVE SYST LTD 发明人 KAWAGUCHI YOSHIHIRO;SUGITANI TETSUKAZU;HATTORI ATSUSHI;NAGAO TAKASHI
分类号 H01L21/301;H01L21/683 主分类号 H01L21/301
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