发明名称 OPTICAL DISTANCE MEASURING APPARATUS
摘要 <P>PROBLEM TO BE SOLVED: To provide an optical distance measuring apparatus that evades a measurement error even when individual optical elements are ideally positioned, and rotates measurement luminous flux around a reference reflector. <P>SOLUTION: Luminous flux emitted by a light source can be freely rotated around the center of the reference reflector. Luminous flux traveling from the light source is split into at least one piece of measurement luminous flux and reference luminous flux through a luminous flux splitting element. At least one piece of the measurement luminous flux travels toward a measurement reflector, and the reference luminous flux travels toward the reference reflector on the same line with at least one piece of the measurement luminous flux. Retroreflection of the measurement luminous flux by the measurement reflector and retroreflection of the reference luminous flux by the reference reflector are performed toward a luminous flux coupling unit, and at this time, at least one piece of the measurement luminous flux is elongated symmetrically about the reference reflector before and after reflection by the measurement reflector. The luminous flux coupling unit causes the measurement luminous flux and reference luminous flux interfere with each other. An interference signal associated with a distance can be detected through a detection unit. <P>COPYRIGHT: (C)2012,JPO&INPIT
申请公布号 JP2012013683(A) 申请公布日期 2012.01.19
申请号 JP20110112968 申请日期 2011.05.20
申请人 DR JOHANNES HEIDENHAIN GMBH 发明人 HOLZAPFEL WOLFGANG;MICHAEL STEPPUTAT;GERHARD VOGT;FLORIAN GARCZAREK
分类号 G01B9/02;G01B11/00 主分类号 G01B9/02
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