| 摘要 |
<p>A probe comprises: a beam part having a Si layer composed of monocrystalline silicon; an interconnect part provided along the longitudinal direction of the beam part on one main surface of the beam part; a contact part provided at a front end part of the interconnect part and to be electrically connected to input/output terminals of an IC device; and a base part supporting a plurality of beam parts all together in a cantilever fashion, and a longitudinal direction of the beam part substantially matches with a crystal orientation <100> of monocrystalline silicon of the Si layer.</p> |
