发明名称 CUTTING DEVICE
摘要 <P>PROBLEM TO BE SOLVED: To cut a rectangular workpiece without increasing the feeding width for holding table feeding means and spindle feeding means. <P>SOLUTION: The center positions in the longitudinal direction of first and second chuck tables 311, 312 represented by line segments L2, L3 are offset in the longitudinal direction with respect to the positions of the rotational axial centers O1, O2 of first and second rotating members 321a, 322a. Accordingly, when a first processing scheduled line extending in the longitudinal direction of a workpiece is cut, the cutting position represented by a line segment L1 reaches a +X direction end portion of the workpiece until the rotational axial center O1 of the rotating member 321a reaches the other end 333b, and thus the whole area of the workpiece can be cut. When a second processing scheduled line extending in the transverse direction of the workpiece is cut, blades 611, 621 reaches a +Y direction end portion of the workpiece until reaching the movement ends of the first and second cutting means 61, 62, and thus the whole area of the workpiece can be cut. <P>COPYRIGHT: (C)2012,JPO&INPIT
申请公布号 JP2012019100(A) 申请公布日期 2012.01.26
申请号 JP20100156004 申请日期 2010.07.08
申请人 DISCO ABRASIVE SYST LTD 发明人 SEKIYA KAZUMA
分类号 H01L21/301 主分类号 H01L21/301
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