发明名称 |
Method for fabrication of semi-conductive structure used to realize micro-electronic devices, involves separating material layer of support wafer from remaining portion of wafer along weakened area |
摘要 |
<p>The method involves gluing a support wafer (200) on a side of a treated semi-conductive structure (100), while using the wafer for manipulating the treated semi-conductive structure. A glued semi-conductive structure (300) is directly fixed on another side of the treated semi-conductive structure, where the glued semi-conductive structure comprises an integrated circuit part. A material layer of the wafer is separated from a remaining portion of the wafer along a weakened area, where the sides of the treated semi-conductive structure are opposite to each other. An independent claim is also included for a semi-conductive structure comprising a strut directly fixed on a first semi-conductive structure.</p> |
申请公布号 |
FR2963162(A1) |
申请公布日期 |
2012.01.27 |
申请号 |
FR20100056122 |
申请日期 |
2010.07.26 |
申请人 |
S.O.I.TEC SILICON ON INSULATOR TECHNOLOGIES |
发明人 |
SADAKA MARIAM;RADU IONUT |
分类号 |
H01L21/82;H01L21/265;H01L21/762 |
主分类号 |
H01L21/82 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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