| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an angular velocity sensor device using Coriolis force with which the detection accuracy of angle speed can be enhanced. <P>SOLUTION: In an angular velocity sensor device having an oscillating sensor element 1, a pedestal 7 for supporting the sensor element 1 so that it can oscillate, and an IC 2 for mounting the pedestal 7 on a top surface and controlling the sensor element 1 in a package 3, at least four corners of the mounting surface of a bottom plate 16 forming the pedestal 7 are provided with recesses 19 and the residual part 20 is connected with the top surface of the IC. <P>COPYRIGHT: (C)2012,JPO&INPIT |
