| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an electrode capable of suppressing deterioration of performance of a laser beam emitted from an laser oscillator and suppressing a consumption amount of the electrode. <P>SOLUTION: An electrode is used for generating discharge between an anode and a cathode by applying voltage between the anode and the cathode. At least a surface layer part of the cathode is made of an alloy of Ni and Mo or an alloy of Ni and W. <P>COPYRIGHT: (C)2012,JPO&INPIT |
