| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a vacuum pump device which can suppress temperature rise by changing a structure on an exhaust side which is not conventionally considered, and thereby remarkably simplified in the structure of a cooling device. <P>SOLUTION: An exhaust-side pipe arrangement 3 includes: a rising part 31 connected to an exhaust port of a vacuum pump 1 and extending upward; a horizontal part 32 horizontally extending from the rising part 31; and a drooping part as an exhaust air discharge part 33 extending downward from an end of the horizontal part 32 and having an exhaust air discharge opening at the lower end; and cools the vacuum pump 1 by spraying the exhaust air of the vacuum pump 1 to the vacuum pump 1. <P>COPYRIGHT: (C)2012,JPO&INPIT |
