| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a vacuum valve in which the valve itself can be miniaturized as small as possible, which has low cost and can prevent the breakage of a constituent caused by the opening and closing of the valve and the repeated use of the valve. <P>SOLUTION: The vacuum valve is composed of a case and a valve body received in the case. In the case, there are formed a valve body receiving hole for receiving the valve body, an intake passage which penetrates the bottom of the valve body receiving hole to the outside of the case, and an exhaust passage which penetrates the side face of the valve body receiving hole to the outside of the case. The valve body can spirally be inserted into the valve body receiving hole, a protrusion insertable into the intake passage is formed at the tip of the valve body, a large-diameter O-ring larger than that of the intake passage is hung to the protrusion, and the valve body is spirally inserted, thus sealing the intake passage by using the valve body and the O-ring. <P>COPYRIGHT: (C)2012,JPO&INPIT |
