| 摘要 |
PURPOSE: An electric heater, a temperature control module, and a method for controlling a temperature of the electric heater are provided to maximally raise a temperature of a substrate without the breakdown of the electric heater. CONSTITUTION: An electric heating element has a resistance value which is changed according to a temperature. A substrate is heated by the electric heating element. A power source(200) supplies power to the electric heating element. A measuring unit(300'') measures a current flowing in the electric heating element and provides a voltage corresponding to the measured current. A control unit(600'') controls the size of the current by comparing the measured voltage with a preset voltage. |
