STAGE DEVICE, LITHOGRAPHIC APPARATUS, AND POSITIONING METHOD FOR OBJECT TABLE

摘要

PROBLEM TO BE SOLVED: To provide a stage device including a measurement system of high accuracy.

SOLUTION: A measurement system configured to measure a position dependent signal of an object table comprises: at least one sensor attachable on the object table; an sensor target object attachable on a substantially stationary frame. The measurement system is an attachment device configured to attach the sensor target object on the substantially stationary frame. The measurement system also comprises a compensator to compensate movement and/or modification of the sensor target object in relation to the substantially stationary frame. The compensator can comprises a passive or active damper and/or a feedback position controller. In an alternative embodiment, the compensator comprises a gripping device to fix the position of the sensor target object while an movable object is moved with high accuracy.

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