| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an angular velocity sensor for reducing the influence of output variation, and for improving output stability. <P>SOLUTION: A pair of angular velocity detection parts 10 and 20 is connected via a first spring 70 having one degree of freedom in a Y axial direction to a pair of driving frames 40 and 41, and a pair of driving frames 40 and 41 is connected via the first spring 70 to an outer frame 50. Then, outside driving weights 30 and 31 connected to the driving frames 40 and 41 are driven by oscillation so that the angular velocity detection parts 10 and 20 can be driven in a Y axial direction. Furthermore, the outer frame 50 is supported via a second spring 71 having one degree of freedom in an X axial direction as a detection direction by an anchor 60. Thus, the driving of the angular velocity detection parts 10 and 20 is separated from the detection of the angular velocity, and the driving components of the angular velocity detection parts 10 and 20 are not included with respect to the outputs of the angular velocity detection parts 10 and 20. Therefore, it is possible to reduce the influence of output variation caused by the other axial components, and to improve the output stability of an angular velocity sensor. <P>COPYRIGHT: (C)2012,JPO&INPIT |
