SUBSTRATE WITH ANTIREFLECTION OPTICAL STRUCTURE AND METHOD OF MANUFACTURING SUBSTRATE WITH ANTIREFLECTION OPTICAL STRUCTURE

摘要

PROBLEM TO BE SOLVED: To provide a substrate with an antireflection optical structure having an antireflection surface composed of a fine structure having superior durability, and to provide a method of manufacturing the substrate with the antireflection optical structure.

SOLUTION: When projections having a fine conical shape or a fine pyramidal shape are arranged on a substrate surface, the damage caused by the surface contact or the like can be reduced, and the mechanical strength can be improved by connecting apexes of their fine projections in an arc shape. Moreover, a substrate having such continuous projections can be manufactured by growing carbon nano-walls formed on the substrate surface by decomposing hydrocarbon gas such as methane gas in plasma and by transferring their shapes onto the substrate surface through the etching processing or the like.

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