| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a polarization conversion unit having a configuration of relatively easy-to-manufacture and arranged in the optical path of an illumination optical system to achieve a pupil intensity distribution of high continuity polarization state in the circumferential direction. <P>SOLUTION: In the polarization conversion unit with a polarization conversion member 51 from which incident light exists while being converted into light in polarization state, the polarization conversion member 51 has a plurality of polarization conversion parts 511-514 formed of an optical rotatory material and arranged in parallel along a plane intersecting the optical axis, and the plurality of polarization conversion parts 511-514 have a planar incidence plane and a planar exit plane non-parallel with the incidence plane, respectively. <P>COPYRIGHT: (C)2012,JPO&INPIT |
