| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a compact, high-sensitivity and high-performance sensor device (biotransistor) operable with high accuracy at a high speed by using a vertical field-effect transistor structure for measuring biomolecules to solve conventional drawbacks. <P>SOLUTION: The sensor device includes a porous insulating layer made of a porous insulating material, a first electrode formed on one surface of the porous insulating layer and having a first opening, a second electrode formed on the other surface of the porous insulating layer and having a second opening corresponding to a hole from the first opening, and a third electrode disposed in the porous insulating layer between the first electrode and the second electrode. <P>COPYRIGHT: (C)2012,JPO&INPIT |
