| 摘要 |
<P>PROBLEM TO BE SOLVED: To allow a user to easily replace only a surface portion when the surface of a stage of a plasma processing apparatus is damaged. <P>SOLUTION: A stage 20 is divided into a stage body 21 and a surface plate 22 above the stage body 21. A pair of rails 61 used to move a processing head 10 are arranged on both sides across the stage 20. A stage maintenance crane 30 is provided on the rails 61. Sliders 34 are respectively provided at lower ends of a pair of support parts 32 of a frame 31 of the crane 30, and the sliders 34 are slidably fitted with the respective rails 61. A suspension tool 51 is suspended from a ceiling part 33 of the frame 31 in a manner capable of being lifted/lowered, and a coupling part 52 is provided on the suspension tool 51. Preferably, the coupling part 52 is coupled to an end face of the surface plate 22 via a bolt 55. <P>COPYRIGHT: (C)2012,JPO&INPIT |
