| 摘要 |
<P>PROBLEM TO BE SOLVED: To solve a problem that vibration in device components (for example, a Z stage mounted above a linear scale for s stage, an Θ stage, a wafer chuck, and a detection optical system) are not correctly fed back to a coordinate value. <P>SOLUTION: An inspection device includes a substrate holding section for holding a substrate; a moving section for moving the substrate holding section, an irradiation section for irradiating the substrate with light; a charge accumulating type detection unit for detecting light from the substrate, and accumulating the charge; a measurement unit for measuring the change of a relative position between the substrate holding section and the moving section; and a processing unit. The charge accumulating type detection unit accumulates the charge obtained based on the measurement result of the measurement unit. The processing unit detects defects of the substrate by using an image generated by the accumulation the charge based on a charge transfer signal. <P>COPYRIGHT: (C)2012,JPO&INPIT |
