ELECTROSTATIC CAPACITANCE TYPE PRESSURE SENSOR, PRESSURE MEASURING DEVICE AND METHOD FOR MANUFACTURING ELECTROSTATIC CAPACITANCE TYPE PRESSURE SENSOR

摘要

PROBLEM TO BE SOLVED: To provide an electrostatic capacitance type pressure sensor capable of detecting not only a pressure but also a temperature.

SOLUTION: The electrostatic capacitance type pressure sensor 100 includes: a substrate 1 having a first electrode portion 4 formed thereon; a second electrode portion 7 formed on the surface of the substrate 1 through an insulator layer 2; a diaphragm 10 which is partially connected to the second electrode portion 7 through a bonding layer 8 formed by intermetallic bonding, and is deformed depending on a pressure; and a temperature sensor 22 which is formed on the surface of the insulator layer 2, and is composed of a material containing at least platinum.

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