| 摘要 |
<P>PROBLEM TO BE SOLVED: To suppress an temperature increase in a valve chest of an introduction valve introducing a halogen-containing gas into an external apparatus, and thereby to suppress a surface corrosion in the valve chest of the introduction valve and a degradation of a sealing member used for the introduction valve. <P>SOLUTION: A halogen-containing gas supply apparatus is provided which supplies a halogen-containing gas to an external apparatus 101 from a container filled with the halogen-containing gas with high pressure. The apparatus includes: a supply tube 4 which connects the container 1 and the external apparatus 101; a first supply valve 3 provided in the supply tube 4 for supplying the halogen-containing gas from the container 1; and a fine part 5 having a 0.5 cm<SP POS="POST">2</SP>or less gas distribution cross-section, at least in a part downstream of the first supply valve 3 of the supply tube 4. <P>COPYRIGHT: (C)2012,JPO&INPIT |
