发明名称 |
SENSOR DEVICE AND METHOD |
摘要 |
A sensor device and method. One embodiment provides a first semiconductor chip having a sensing region. A porous structure element is attached to the first semiconductor chip. A first region of the porous structure element faces the sensing region of the first semiconductor chip. An encapsulation material partially encapsulates the first semiconductor chip and the porous structure element.
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申请公布号 |
US2012126344(A1) |
申请公布日期 |
2012.05.24 |
申请号 |
US201213359195 |
申请日期 |
2012.01.26 |
申请人 |
ELIAN KLAUS;MEYER-BERG GEORG;THEUSS HORST;INFINEON TECHNOLOGIES AG |
发明人 |
ELIAN KLAUS;MEYER-BERG GEORG;THEUSS HORST |
分类号 |
H01L29/84;H01L21/50;H01L29/66 |
主分类号 |
H01L29/84 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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