METHOD FOR FORMING DIELECTRIC THIN FILM, AND THIN FILM CAPACITOR COMPRISING THE DIELECTRIC THIN FILM

摘要

In this process of forming a dielectric thin film, when a dielectric thin film represented by Ba 1-x Sr x Ti y O 3 (0.2 < x < 0.6 and 0.9 < y < 1.1) is formed by a sol-gel method, the process from coating to baking is carried out 2 to 9 times, the thickness of the thin film formed after the initial baking is 20 nm to 80 nm, the thickness of each thin film formed after the second baking and beyond is 20 nm to less than 200 nm, each baking from the first time to the second to ninth times is carried out by heating to a prescribed temperature within the range of 500°C to 800°C at a heating rate of 1°C to 50°C/minute in an atmosphere at atmospheric pressure, and the total thickness of the dielectric thin film is 100 nm to 600 nm.