| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a perpendicular write head having a wrap around shield and a conformal side gap. <P>SOLUTION: A perpendicular write head having a wrap around shield and a conformal side gap is provided. In fabricating the write head, a leading edge shield may be chemical mechanical polished down to a level that is substantially even with a chemical mechanical polishing stop layer. Because the leading edge shield and the chemical mechanical polishing stop layer are used as RIE stop for trench RIE, a fully conformal side shield may be formed with a LTE/LES. <P>COPYRIGHT: (C)2012,JPO&INPIT |
