| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a liquid treatment apparatus, etc. which makes it possible to adjust a flow inside a treatment tank depending on the type of liquid to be replaced. <P>SOLUTION: A treatment bank 22, in which liquid treatment is carried out and which accommodates a target substrate to be treated W, has an opening 222 formed at the top, a lower port 226 provided at the bottom for supplying replacement liquid and discharging liquid, and a lid 23 detachably installed for the opening 222 and provided with an upper port 234 provided for supplying liquid and discharging gas. A transfer mechanism 4 is installed, in order to adjust a flow of the liquid supplied from the upper port 234 between a preservation unit 5 and the treatment tank 22, exchangeably between that and the target substrate W, conveying a first or a second current plate having formed therein a pore differing in aperture area from each other. A drying atmosphere formation unit turns the inside of the treatment tank 22 filled with dehydration prevention liquid into an atmosphere of high pressure fluid and, thereafter, reduces the internal pressure thereof to dry the target substrate W. <P>COPYRIGHT: (C)2012,JPO&INPIT |
