发明名称 PATTERN FORMING METHOD AND PATTERN FORMING APPARATUS
摘要 <P>PROBLEM TO BE SOLVED: To form a finger wiring pattern 71a to be a thick film (high aspect ratio) when forming finger wiring patterns 71a, 71b intersecting a bus wiring pattern 73a on a principal surface of a substrate 9 and prevent end thickening 3 and end thinning 4 of the finger wiring patterns 71a, 71b from occurring on an exposed surface of the substrate 9. <P>SOLUTION: When a first nozzle 47 relatively moving with respect to a substrate 9 while discharging a paste 7 for forming a first finger wiring pattern 71a by coating reaches on a second bus wiring region 73bA or on a second bus wiring pattern 73b, discharge of the paste 7 from the first nozzle 47 is stopped. <P>COPYRIGHT: (C)2012,JPO&INPIT
申请公布号 JP2012129227(A) 申请公布日期 2012.07.05
申请号 JP20100276624 申请日期 2010.12.13
申请人 DAINIPPON SCREEN MFG CO LTD 发明人 SANADA MASAKAZU
分类号 H01L31/04 主分类号 H01L31/04
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