| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a non contact conveyor apparatus of a wiring board which improves production efficiency of the wiring board by changing suction part structure according to the type of the wiring board in short period of time. <P>SOLUTION: A non contact conveyor apparatus of this invention includes a suction part 20, and the suction part 20 includes a suction head 211 and a head support part 201. Multiple air blow-out holes 81 are provided in the suction head 211. Further, ion air blow-out holes 82 for blowing ion air onto a main surface of each substrate are provided in the head support part 201. The head support part 201 supports the suction head 211, and the suction head 211 is replaceable. <P>COPYRIGHT: (C)2012,JPO&INPIT |
