发明名称 APPARATUS FOR TREATING ORGANIC ZINC COMPOUND
摘要 <P>PROBLEM TO BE SOLVED: To provide an apparatus for treating an organic zinc compound, capable of effectively suppressing production of particles induced by self decomposition of the organic zinc compound or its reaction with a trace amount of moisture by a simple method/structure. <P>SOLUTION: In the treatment apparatus, a tip 2b of a flow tube 2a connected to a liquid material feeder part 2 is arranged in a liquid layer of the liquid material and adjacent to a suppression treatment part 3. In a treatment tank 10, the liquid material contacts the suppression treatment part 3, thereby suppressing the production of impurities containing decomposition products in the liquid material. <P>COPYRIGHT: (C)2012,JPO&INPIT
申请公布号 JP2012131747(A) 申请公布日期 2012.07.12
申请号 JP20100286385 申请日期 2010.12.22
申请人 AIR LIQUIDE JAPAN LTD 发明人 SHIGAKI CHIKA;YANAGIDA TOMOKO;KAMEOKA TAKASHI;KOURA TERUMASA
分类号 C07F3/06;C23C16/448;H01L21/365 主分类号 C07F3/06
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