| 摘要 |
PURPOSE: A method for increasing a surface area of a metallic film using a soft stamp is provided to form a through-hole having a stable structure, thereby increasing a surface area of a metallic film. CONSTITUTION: A soft stamp increases a surface area by selectively etching a metallic film using imprint lithography. A first pattern layer(12) is formed on a transparent base plate(11). A supporting layer(13) is spread on the first pattern layer in a conformal spreading method to support the first pattern layer. A release layer(14) is spread on the supporting layer in the conformal method. The first pattern layer is formed into a plurality of cylinder patterns(12b). The plurality of cylinder patterns is arranged to be spaced at a constant interval. The surface area of a metallic film is increased by selectively etching the metallic film by using the soft stamp.
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