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经营范围
发明名称
Cold Trap For Processing A Substrate
摘要
申请公布号
KR200461392(Y1)
申请公布日期
2012.07.13
申请号
KR20100006966U
申请日期
2010.06.30
申请人
发明人
分类号
H01L21/02
主分类号
H01L21/02
代理机构
代理人
主权项
地址
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