| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a rear surface irradiation detector for detecting electromagnetic radiation near a predetermined wavelength. <P>SOLUTION: The detector includes a semiconductor absorption layer (14) formed above a transparent medium and making at least a part of radiation permeate therethrough, a mirror (22) above the semiconductor layer (14), and the periodic lattice (18) of a metal pattern (20) placed between the mirror (22) and the semiconductor layer (14). The mirror (22) and lattice (18) are contained in a material layer (16) formed on the semiconductor layer (14) and transparent to the radiation. The mirror (22) and lattice (18) satisfy the following relations; d≤λ/Re(n<SB POS="POST">1</SB>), λ/(16×Re(n<SB POS="POST">2</SB>))+m×λ/(2×Re(n<SB POS="POST">2</SB>))≤h≤3×λ/(8×Re(n<SB POS="POST">2</SB>))+m×λ/(2×Re(n<SB POS="POST">2</SB>)), Re(n<SB POS="POST">2</SB>)≤1.3×Re(n<SB POS="POST">1</SB>), Re(n<SB POS="POST">1</SB>)≥Re(n<SB POS="POST">substrat</SB>). <P>COPYRIGHT: (C)2012,JPO&INPIT |
