| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a glass substrate surface-cleaning apparatus having a cleaning function capable of properly responding to the various kinds of sizes (for example, 10 to 1,000 μm) of foreign matters (mainly glass cullets) present on a glass substrate; and to provide a glass substrate surface-cleaning method. <P>SOLUTION: The glass substrate surface-cleaning apparatus 100 includes a glass substrate support and transport mechanism 20 that supports and transports the glass substrate 50 in a first direction (M in Fig.3). The apparatus 100 further includes a glass substrate surface-cleaning mechanism 10 having a cleaning belt 11 that removes foreign matter 300 adhered to the surface of the glass substrate and that slides on the surface of the glass substrate in a second direction (N in Fig.3) that intersects the first direction. The cleaning belt 11 includes a plurality of three-dimensionally structured abrasive material-coated film 70 and grooves 60 located between the three-dimensionally structured abrasive material film on the surface. The width 62 of the grooves 60 is wider than the contour width size of the foreign matter 300 adhered to the glass substrate surface. <P>COPYRIGHT: (C)2012,JPO&INPIT |
