| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a scanning tunnel microscope using tunnel resistance, which allows high-sensitive and high-quantitative tunnel resistance measurement over the wide dynamic range; and a stable feedback control of a scanning tunnel microscope using tunnel resistance. <P>SOLUTION: A scanning tunnel microscope 1 comprises a sample stage 2 on which a sample 5 can be placed, a tunnel resistance R<SB POS="POST">t</SB>between the sample 5 and a probe 3 disposed apart from and opposite to the sample 5, a resonance circuit 10 including a matching resistance R<SB POS="POST">m</SB>parallelly connected to the tunnel resistance R<SB POS="POST">t</SB>, a directional coupler 12 connected to the resonance circuit 10, a high frequency input and output device 14 which transmits a high frequency signal to the resonance circuit 10 through the directional coupler 12, and a reflection measurement device 16 which receives a reflection signal from the resonance circuit 10 through the directional coupler 12. <P>COPYRIGHT: (C)2012,JPO&INPIT |
