| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a substrate transfer apparatus capable of supporting any of a substrate and a spacer member by the same fork, and reducing an interval between the substrate and the spacer member housed in a housing container. <P>SOLUTION: The substrate transfer apparatus transfers a laminate in which two substrates, with rear surfaces facing each other, are stacked with a spacer member in between, to a substrate holding part that holds a plurality of laminates in vertical direction. It includes a first fork 53 for delivery of the laminate to/from the substrate holding part, a second fork 54 which is provided at a housing part for housing the substrate and the spacer member for reciprocation and vertical inversion, above the first fork 53, for delivery of the substrate or spacer member between the housing part and the first fork 53, a first gripping mechanism 61 which is provided on one surface 54a side of the second fork 54 for gripping the substrate from above, and a second gripping mechanism 62 which is provided on the same surface side as one surface 54a of the second fork 54, for gripping the spacer member from above. <P>COPYRIGHT: (C)2012,JPO&INPIT |
