A POLYMER-GLASS SUBSTRATE FOR DISPLAY PANEL AND THE MANUFACTURING METHOD THEREOF

摘要

PURPOSE: A polymer glass substrate for a display panel and a manufacturing method thereof are provided to deposit plasma at a low temperature by adjusting bias power applied to an electrode mounted on a polymer substrate. CONSTITUTION: A substrate(10) is made of a polymer. The substrate is a polymer glass substrate. A coating film(20) is deposited on an upper side of the substrate. The coating film is deposited by plasma enhanced chemical vapor deposition. The coating film is made of a silicone compound. The coating film is made of silicon oxide(SiOx), silicon nitride(SiN), or silicon oxynitride(SiON). [Reference numerals] (10) Substrate; (20) Coating layer