PLASMA OXIDATION METHOD AND PLASMA PROCESSING APPARATUS,申请号KR20097020434-传众专利搜索

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发明名称	PLASMA OXIDATION METHOD AND PLASMA PROCESSING APPARATUS
摘要
申请公布号	KR101188553(B1)	申请公布日期	2012.10.05
申请号	KR20097020434	申请日期	2008.03.28
申请人		发明人
分类号	H01L21/316;H01L21/76	主分类号	H01L21/316
代理机构		代理人
主权项
地址

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