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发明名称
VACUUM FILM-FORMING APPARATUS
摘要
申请公布号
KR101187619(B1)
申请公布日期
2012.10.05
申请号
KR20050041756
申请日期
2005.05.18
申请人
发明人
分类号
H01L21/20;C23C14/00;C23C16/00;C23C16/02;C23C16/34;C23C16/38;C23C16/44;C23C16/455;C23C16/54
主分类号
H01L21/20
代理机构
代理人
主权项
地址
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