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发明名称
METHODS AND APPARATUS FOR DEPOSITING TANTALUM METAL FILMS TO SURFACES AND SUBSTRATES
摘要
申请公布号
HK1136607(A1)
申请公布日期
2012.10.05
申请号
HK20100101988
申请日期
2010.02.25
申请人
BATTELLE MEMORIAL INSTITUTE
发明人
YONKER, CLEMENT, R.;MATSON, DEAN, W.;BAYS, JOHN, T.
分类号
C23C
主分类号
C23C
代理机构
代理人
主权项
地址
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