METHOD AND APPARATUS FOR MANUFACTURING LIGHT EMIT DEVICE USING HYPERTHERMAL NEUTRAL BEAM

摘要

PURPOSE: A method and apparatus for manufacturing a light emit device using neutral particle beams are provided to prevent quality degradation by improving doping efficiency of a semiconductor layer. CONSTITUTION: A neutral particle beam(2) includes nitrogen atoms and inert elements. A group III solid element is emitted to the neutral particle beam. The neutral particle beam and the group III solid element are formed on a substrate(5). A nitride semiconductor is deposited on the substrate into a single crystal thin film. Provided is a solid element to the single crystal thin film. [Reference numerals] (1) Neutral particle beam generation source; (2) Neutral particle beam; (3) Solid element generation source; (4) Group III solid element; (5) Substrate; (6) Substrate mounting table; (7) Process chamber