发明名称 |
MEMS device fabricated on a pre-patterned substrate |
摘要 |
A microelectromechanical systems device fabricated on a pre-patterned substrate having grooves formed therein. A lower electrode is deposited over the substrate and separated from an orthogonal upper electrode by a cavity. The upper electrode is configured to be movable to modulate light. A semi-reflective layer and a transparent material are formed over the movable upper electrode. |
申请公布号 |
US8285089(B2) |
申请公布日期 |
2012.10.09 |
申请号 |
US201213369546 |
申请日期 |
2012.02.09 |
申请人 |
CHUI CLARENCE;QUALCOMM MEMS TECHNOLOGIES, INC. |
发明人 |
CHUI CLARENCE |
分类号 |
G02B6/35;G02F1/29;H01L21/44 |
主分类号 |
G02B6/35 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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