| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a microelectromechanical system (MEMS) element in which an upper electrode is movable with a low voltage to operate on and off actions, and also such a shape change of a device as affecting on the operating voltage does not occur even when an ambient temperature rises. <P>SOLUTION: The MEMS element includes: a first column 5 formed on an insulating substrate 1; a second column 6 formed on the insulating substrate 1 while being spaced apart from the first column 5; a first electrode 8 including a fixed end 8a fixed to the first column 5 and a free end 8b movably disposed on the second column 6; and a second electrode 4 formed in a position lower than those of the first column 5 and the second column 6 in a region between the first column 5 and the second column 6 on the insulating substrate 1. <P>COPYRIGHT: (C)2013,JPO&INPIT |
