| 摘要 |
<P>PROBLEM TO BE SOLVED: To prevent the motion of a torsion bar from being inhibited under the stress of a lead wiring which connects a drive coil with an external connection terminal, for improved drive efficiency at a movable part. <P>SOLUTION: In a planner type electromagnetic actuator, a fixed part 3, a movable part 4, and a torsion bar 3 are integrally formed on a semiconductor substrate, and a conductive pattern 5 is formed on an insulating layer 8 on the surface of the semiconductor substrate, which pattern contains a lead wiring 5B for wiring by way of above the torsion bar 3 between a drive coil 5A arranged at the movable part 4 and an external electrode terminal 7 arranged at the fixed part 2 as well as between the drive coil 5A and the external electrode terminal 7, and further, a current is supplied to the drive coil 5A to drive the movable part 4. Except for the lead wiring 5B portion above the torsion bar 3, an adhesion layer 9 whose adhesiveness to an insulating layer 8 is higher than the conductive pattern 5 is provided between the insulation layer 8 and the conductive pattern 5, so that the lead wiring 5 above the torsion bar 3 containing no adhesion layer 9 contacts to the insulation layer 8. <P>COPYRIGHT: (C)2013,JPO&INPIT |
