发明名称 FILM-SHAPED SEMICONDUCTOR CHIP ADHESIVE AGENT, SEMICONDUCTOR PROCESSING ADHESIVE SHEET, AND SEMICONDUCTOR DEVICE MANUFACTURING METHOD
摘要 <P>PROBLEM TO BE SOLVED: To provide a film-shaped semiconductor chip adhesive agent which can be easily divided into a chip size by an expand process after being adhered to an adherend such as a semiconductor wafer or a semiconductor chip, or a semiconductor processing adhesive sheet including an adhesive agent layer. <P>SOLUTION: A hole 30 is formed in a film-shaped semiconductor chip adhesive agent 1. A semiconductor processing adhesive sheet is stacked on a base material using the film-shaped semiconductor chip adhesive agent 1 in which the hole 30 is formed as an adhesive agent layer, and the adhesive agent layer is stacked on the base material so as to be peeled off therefrom. <P>COPYRIGHT: (C)2013,JPO&INPIT
申请公布号 JP2012209386(A) 申请公布日期 2012.10.25
申请号 JP20110073109 申请日期 2011.03.29
申请人 LINTEC CORP 发明人 SATO AKINORI;WAKAYAMA YOJI;NOMURA SHUICHI
分类号 H01L21/301;H01L21/52 主分类号 H01L21/301
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