发明名称 RADIATION DETECTION ELEMENT AND METHOD FOR MANUFACTURING THE SAME
摘要 <P>PROBLEM TO BE SOLVED: To prevent decrease of resolution of a pick up image and peeling of a scintillator from a substrate when light emission of the scintillator is diffused among pixels though there are a plurality of pixels in an image sensor of a radiation detection element. <P>SOLUTION: A radiation detection element is provided, which has processes of: forming a scintillator layer so as to extend over a plurality of projected areas on a substrate including a plurality of light detection parts, and a plurality of projected areas each of which has a plurality of projections, and each of the plurality of projected areas overlaps with each of the plurality of light detection parts; and reducing temperature of the substrate on which the scintillator layer is formed to form a crack in the scintillator layer corresponding to the lamination direction of a part between adjacent projected areas of the scintillator layer, in which the plurality of projected areas satisfy specific relation, and a method for manufacturing the same. <P>COPYRIGHT: (C)2013,JPO&INPIT
申请公布号 JP2012225909(A) 申请公布日期 2012.11.15
申请号 JP20120058773 申请日期 2012.03.15
申请人 CANON INC 发明人 HORIE RYOKO;YASUI NOBUHIRO;OHASHI RYOTA;DEN TORU
分类号 G01T1/20;H01L27/14;H01L27/144;H01L31/09 主分类号 G01T1/20
代理机构 代理人
主权项
地址