发明名称 METHOD AND APPARATUS FOR TRANSFERRING DIE FROM A WAFER
摘要 <p>Disclosed herein is a method for transferring die from a wafer that includes picking two or more die from a wafer using a multi-spindle picking head, wherein the multi-spindle picking head is rotatable. The method includes moving the multi-spindle picking head from the wafer feeder to a placement machine, and presenting the two or more picked die to the placement machine for subsequent placement. Further disclosed herein is an apparatus for transferring die from a wafer that includes a picking head with a plurality of spindles. Each spindle is configured to pick a die from a wafer of die. The multi-spindle picking head is rotatable and moveable in at least one direction.</p>
申请公布号 KR20120127719(A) 申请公布日期 2012.11.23
申请号 KR20127022144 申请日期 2011.01.27
申请人 发明人
分类号 H01L21/677;H01L21/50;H01L21/68 主分类号 H01L21/677
代理机构 代理人
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