PATTERN FORMING DEVICE AND PATTERN FORMING METHOD

摘要

PROBLEM TO BE SOLVED: To provide a technique capable of further microfabrication and high aspect of a pattern in a pattern forming technique of forming a predetermined pattern on a substrate surface by applying and curing a coating liquid on the substrate surface.

SOLUTION: A side surface of a coating liquid for partition wall formation discharged from a discharge nozzle 523 to a substrate W is collectively irradiated with light converged by a lens 534 provided at the lower end of a light guide 533. The surface can be inhibited from rounding and the coating liquid can be inhibited from widening by surface tension generated by curing the side surface of the coating liquid prior to the other portions. Thereby, it is possible to form a partition wall B which is thin and uniform, and of which side surface is sharply raised up.

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