TEMPERATURE DETECTION METHOD, SUBSTRATE LAMINATING METHOD, LAMINATED SUBSTRATE, AND TEMPERATURE DETECTION DEVICE

摘要

PROBLEM TO BE SOLVED: To solve the problem that it is impossible to detect which of heating parts has caused a temperature abnormality, when a substrate is heated from both sides by the heating parts.

SOLUTION: A temperature detection method for a heating device which heats a substrate from both sides by a pair of heating parts includes: an installation step of installing a heat insulation member in a position where the substrate is to be disposed, between the pair of heating parts; and a detection step of detecting a temperature of at least one heating part side of the heat insulation member in the state where the pair of heating parts radiate heat.

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