| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a laser irradiation apparatus and a laser irradiation method capable of performing a laser process while keeping a distance with a processing object portion constant without incurring increasing in an interference possibility with an inner surface of the processing object. <P>SOLUTION: The laser irradiation apparatus includes: a laser light transmission mechanism to guide laser light from a laser light source and emit the laser light from a laser light emission part; a condensing mechanism to condense the laser light; a pipe state casing to house and hold the condensing mechanism inside thereof and have an opening to irradiate the laser light; a fluid supply mechanism to supply a fluid into the casing to emit the fluid from the opening; a positioning mechanism provided at the casing to keep a distance from the condensing mechanism to the processing object constant by being brought into contact with the processing object; and a fluid guide mechanism to guide the fluid emitted from the opening to flow between the casing and the processing object along an axial direction of the casing and generate an ejector effect between the casing and the processing object. <P>COPYRIGHT: (C)2013,JPO&INPIT |
