| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a chemical solution volatilizing apparatus which is taken out from a storage case by holding a chemical solution container with fingers to suppress the storage case from being large in size. <P>SOLUTION: The chemical solution volatilizing apparatus includes: a storage case 1 that can storing a chemical solution container A through an opening 5 formed on a bottom part of the case; a holder 2 in which the chemical solution container stored in the storage case is attachable/detachable in the vertical direction; an operating tool 3 can operating the holder 2 to be raised/lowered so that the chemical solution container A attached to the holder 2 moves from a chemical solution volatilizing position on which the chemical solution container may volatilize chemical solution to a projection position on which a lower part of the chemical solution container A is projected from the opening part 5 downward. <P>COPYRIGHT: (C)2013,JPO&INPIT |
