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发明名称
HOT WIRE CHEMICAL VAPOR DEPOSITION WITH CARBIDE FILAMENTS
摘要
申请公布号
KR20130007589(A)
申请公布日期
2013.01.18
申请号
KR20127025342
申请日期
2011.02.25
申请人
ALLIANCE FOR SUSTAINABLE ENERGY, LLC
发明人
LANDRY MARC;MARTIN INA;SHUB MAXIM;TEPLIN CHARLES;MARINER JOHN;PORTUGAL JAMES
分类号
C23C16/44;C23C16/448;H01L21/205
主分类号
C23C16/44
代理机构
代理人
主权项
地址
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